Abstract：ZnO thin films were successfully fabricated by sol-gel method and R.F. Magnetron Sputtering on quartz glass substrates. The preparing details were thoroughly introduced. X-ray Diffractometer (XRD), Atomic Force Microscope (AFM) , Raman Scattering Spectroscope (RAMAN), UV-Vis Absorp-tion(UV-Vis) were used to carried out specific studies and comparisons of their specialties. The results show that, coated on same substrates, annealed at same temperature, the films prepared by magnetron sputtering show much more prominent c-axis orientation and excellent crystallinity than those prepared by sol-gel.
任思雨, 王英连, 孙汪典, 刘玉华. 溶胶-凝胶法与射频磁控溅射法制备ZnO薄膜及其表征对比[J]. 材料工程, 2004, 0(11): 50-52,56.
REN Si-yu, WANG Ying-lian, SUN Wang-dian, LIU Yu-hua. Characteristic Comparison of ZnO Thin Film Prepared by Sol-gel Method and R.F. Magnetron Sputtering. Journal of Materials Engineering, 2004, 0(11): 50-52,56.
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