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材料工程  2016, Vol. 44 Issue (9): 63-67    DOI: 10.11868/j.issn.1001-4381.2016.09.010
  材料与工艺 本期目录 | 过刊浏览 | 高级检索 |
硫化时间对固态硫化铜锌锡硫薄膜性能的影响
曹中明, 杨元政, 许佳雄, 谢致薇
广东工业大学 材料与能源学院, 广州 510006
Effect of Sulfurization Time on Properties of CZTS Thin Films by Solid-state Sulfurization
CAO Zhong-ming, YANG Yuan-zheng, XU Jia-xiong, XIE Zhi-wei
School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China
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摘要 采用固态硫化法硫化铜锡锌(CZT)预制膜制备铜锌锡硫(Cu2ZnSnS4,CZTS)薄膜,研究硫化时间对CZTS薄膜性能的影响。利用X射线衍射仪(XRD)和紫外拉曼光谱仪(Raman)分析薄膜的物相结构,通过X射线能谱仪(EDS)分析薄膜的化学组分,采用扫描电镜(SEM)观察薄膜的表面形貌,利用UV-Vis研究薄膜的光学特性。结果表明:随着硫化时间延长,Cu含量增加,Zn含量明显减少。硫化40min以上制备的薄膜出现导致禁带宽度减小的杂相SnS,Sn2S3和Cu2SnS3。当硫化时间为20min时,样品为单相的CZTS薄膜,薄膜表面均匀平整,化学组分贫Cu富Sn,吸收系数达104cm-1,禁带宽度Eg约为1.56eV。
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曹中明
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关键词 磁控溅射铜锌锡硫薄膜固态硫化硫化时间    
Abstract:Cu2ZnSnS4 (CZTS) thin films were prepared by solid-state sulfurizing Cu-Zn-Sn(CZT) metallic precursors. The effect of sulfurization time on phases, chemical composition, surface morphology and optical properties was investigated by X-ray diffraction (XRD), Raman spectrum, energy dispersive of X-ray (EDS), scanning electron microscope (SEM) and UV-Vis, respectively. The results show that with the sulfurization time and content of Cu increase, Zn particularly decreases. The films that sulfurized over 40min occur with impurities like SnS, Sn2S3 and Cu2SnS3, which lead smaller optical band gap. When the sulfurization time is 20min, the sample is single phase CZTS thin film, which surface is uniform and even, Cu-poor and Sn-rich. The absorption coefficient is over 104cm-1. The band gap energy is estimated 1.56eV.
Key wordsmagnetron sputtering    CZTS thin film    solid-state sulfurization    sulfurization time
收稿日期: 2015-01-13      出版日期: 2016-09-27
中图分类号:  TB332  
  TM615  
通讯作者: 杨元政(1966-),男,教授,现从事微电子薄膜材料研究,联系地址:广东省广州市番禺区广州大学城外环西路100号广东工业大学材料与能源学院(510006),E-mail:yangyz@gdut.edu.cn     E-mail: yangyz@gdut.edu.cn
引用本文:   
曹中明, 杨元政, 许佳雄, 谢致薇. 硫化时间对固态硫化铜锌锡硫薄膜性能的影响[J]. 材料工程, 2016, 44(9): 63-67.
CAO Zhong-ming, YANG Yuan-zheng, XU Jia-xiong, XIE Zhi-wei. Effect of Sulfurization Time on Properties of CZTS Thin Films by Solid-state Sulfurization. Journal of Materials Engineering, 2016, 44(9): 63-67.
链接本文:  
http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2016.09.010      或      http://jme.biam.ac.cn/CN/Y2016/V44/I9/63
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