Performance of PDC-SiBCN ceramic based wireless passive temperature sensor
Yu-xi YU(), Bin HAN
Fujian Key Laboratory of Advanced Materials, Department of Materials Science and Engineering, College of Materials, Xiamen University, Xiamen 361005, Fujian, China
The high temperature resistant polymer derived ceramic (PDC-SiBCN) was used as a temperature sensitive dielectric material, and metal platinum was used as a resonant cavity material, and a coplanar antenna was formed by slotting on the surface of the ceramic to fabricate a wireless passive temperature sensor integrating the slot antenna and the resonator. The sensor can realize the wireless passive transmission of temperature information. The results show that the resonant frequency of the sensor is declined monotonically with the increase of the testing temperature, the dielectric constant of PDC-SiBCN ceramic is increased monotonously with increasing temperature, and the sensor with a pyrolysis temperature of 1000℃ is tested up to 1100℃, which has excellent high temperature resistance and dielectric temperature properties. At the same test temperature, the resonant frequency of the sensor is decreased with increasing diameter and also is reduced with increasing pyrolysis temperature. The sensitivity equation is obtained by performing a first-order partial derivative of the resonant frequency-temperature fitting curve of the sensor, and the sensor has a high sensitivity at a high temperature of 1100℃. The sensor has good cycle stability, and it has an actual wireless transmission distance of 42 mm at room temperature and a transmission distance of up to 8 mm when the testing temperature is 1100℃, which can be used for temperature monitoring of aero-engine in high temperature and harsh environments.
GREGORY O J , YOU T . Ceramic temperature sensors for harsh environments[J]. IEEE Sensors Journal, 2005, 5 (5): 833- 838.
doi: 10.1109/JSEN.2005.844346
2
FERNANDEZ A F , GUSAROV A I , BRICHARD B , et al. Temperature monitoring of nuclear reactor cores with multiplexed fiber Bragg grating sensors[J]. Optical Engineering, 2002, 41 (6): 1246- 1255.
doi: 10.1117/1.1475739
3
HERFURTH P , MAIER D , LUGANI L , et al. Ultrathin body InAlN/GaN HEMTs for high-temperature (600℃) electronics[J]. IEEE Electron Device Letters, 2013, 34 (4): 496- 498.
doi: 10.1109/LED.2013.2245625
MA H Y , HUANG Q A , QIN M . Design of resonant MEMS temperature sensor[J]. Optical and Precision Engineering, 2010, 18 (9): 2022- 2027.
5
CAGLIANI A , FISCHER L M , LYAGER J , et al. Investigation of peptide based surface functionalization for copper ions detection using an ultrasensitive mechanical microresonator[J]. Sensors and Actuators: B, 2011, 160 (1): 1250- 1254.
doi: 10.1016/j.snb.2011.09.058
6
CHENG H , EBADI S , GONG X . A low-profile wireless passive temperature sensor using resonator/antenna integration up to 1100℃[J]. IEEE Antennas and Wireless Propagation Letters, 2012, 11, 369- 372.
doi: 10.1109/LAWP.2012.2192249
LI L C , YU Y X , HUANG Q F , et al. Fabrication of PDC-SiCN ceramic based wireless passive temperature sensors[J]. Journal of Functional Materials, 2017, 48 (7): 7169- 7172.
8
SARKAR S , GAN Z , AN L , et al. Structural evolution of polymer-derived amorphous SiBCN ceramics at high temperature[J]. The Journal of Physical Chemistry: C, 2011, 115 (50): 24993- 25000.
doi: 10.1021/jp203287h
TAN X , LIU W , CAO L M , et al. Effects of LaPO4 coating on properties of carbon fiber reinforced SiBCN ceramic matrix composites[J]. Journal of Materials Engineering, 2018, 46 (6): 106- 112.
10
MVLLER A , GERSTEL P , BUTCHEREIT E , et al. Si/B/C/N/Al precursor-derived ceramics: synthesis, high temperature behaviour and oxidation resistance[J]. Journal of the European Ceramic Society, 2004, 24 (12): 3409- 3417.
doi: 10.1016/j.jeurceramsoc.2003.10.018
11
CHEN Y , YANG X , CAO Y , et al. Effect of pyrolysis temper-ature on the electric conductivity of polymer-derived silicoboron carbonitride[J]. Journal of the European Ceramic Society, 2014, 34 (10): 2163- 2167.
doi: 10.1016/j.jeurceramsoc.2014.03.012
12
HERMANN A M , WANG Y T , RAMAKRISHNAN P A , et al. Structure and electronic transport properties of Si-(B)-C-N ceramics[J]. Journal of the American Ceramic Society, 2001, 84 (10): 2260- 2264.
13
KUMAR N V R , PRINZ S , CAI Y , et al. Crystallization and creep behavior of Si-B-C-N ceramics[J]. Acta Materialia, 2005, 53 (17): 4567- 4578.
doi: 10.1016/j.actamat.2005.06.011
14
REN X , EBADI S , CHEN Y , et al. Characterization of SiCN ceramic material dielectric properties at high temperatures for harsh environment sensing applications[J]. IEEE Transactions on Microwave Theory and Techniques, 2013, 61 (2): 960- 971.
doi: 10.1109/TMTT.2012.2234476
15
CHENG H , REN X , EBADI S , et al. Wireless passive temper-ature sensors using integrated cylindrical resonator/antenna for harsh-environment applications[J]. IEEE Sensors Journal, 2015, 15 (3): 1453- 1462.
doi: 10.1109/JSEN.2014.2363426
16
LI Y , YU Y X , SAN H S , et al. Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator/antenna[J]. Applied Physics Letters, 2013, 103 (16): 163505.
doi: 10.1063/1.4824827
17
YE F , ZHANG L , YIN X , et al. Dielectric and EMW absorbing properties of PDCs-SiBCN annealed at different temperatures[J]. Journal of the European Ceramic Society, 2013, 33 (8): 1469- 1477.
doi: 10.1016/j.jeurceramsoc.2013.01.006