PDC-SiBCN陶瓷基无线无源温度传感器的性能

doi:10.11868/j.issn.1001-4381.2018.001319

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摘要

以耐高温聚合物先驱体陶瓷（PDC-SiBCN）为温敏介质材料，金属铂作为谐振腔材料，并在陶瓷表面开槽形成共面天线，制备出集开槽天线与谐振器一体的无线无源温度传感器，实现温度信息的无线无源传输。结果表明：传感器的谐振频率随测试温度的升高呈单调递减变化，PDC-SiBCN陶瓷的介电常数随温度的升高而单调增加，其中热解温度为1000℃的传感器测试温度达1100℃，具有优异的耐高温性和介温特性。同一测试温度下传感器的谐振频率随直径的增大而减小，也随热解温度的升高而降低。通过对传感器的谐振频率-温度拟合曲线进行一阶偏导得到灵敏度方程，传感器在1100℃的高温下有较高的灵敏度。传感器具有良好的循环稳定性能，在室温下实际无线传输距离达到42 mm，当测试温度为1100℃时传输距离可达8 mm，可应用于高温恶劣环境下航空发动机的温度监控。

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	余煜玺
	韩滨

关键词 ：聚合物先驱体陶瓷, 温度传感器, 耐高温

Abstract：

The high temperature resistant polymer derived ceramic (PDC-SiBCN) was used as a temperature sensitive dielectric material, and metal platinum was used as a resonant cavity material, and a coplanar antenna was formed by slotting on the surface of the ceramic to fabricate a wireless passive temperature sensor integrating the slot antenna and the resonator. The sensor can realize the wireless passive transmission of temperature information. The results show that the resonant frequency of the sensor is declined monotonically with the increase of the testing temperature, the dielectric constant of PDC-SiBCN ceramic is increased monotonously with increasing temperature, and the sensor with a pyrolysis temperature of 1000℃ is tested up to 1100℃, which has excellent high temperature resistance and dielectric temperature properties. At the same test temperature, the resonant frequency of the sensor is decreased with increasing diameter and also is reduced with increasing pyrolysis temperature. The sensitivity equation is obtained by performing a first-order partial derivative of the resonant frequency-temperature fitting curve of the sensor, and the sensor has a high sensitivity at a high temperature of 1100℃. The sensor has good cycle stability, and it has an actual wireless transmission distance of 42 mm at room temperature and a transmission distance of up to 8 mm when the testing temperature is 1100℃, which can be used for temperature monitoring of aero-engine in high temperature and harsh environments.

Key words： polymer derived ceramic temperature sensor high temperature resistance

收稿日期: 2018-11-13 出版日期: 2020-01-09

中图分类号:

TB332

基金资助:国家自然科学基金(51675452);国防科技工业核动力技术创新中心专项科研项目(HDLCXZX-2019-ZH-025)

通讯作者: 余煜玺 E-mail: yu_heart@xmu.edu.cn

作者简介: 余煜玺(1974—), 男, 博士, 教授, 主要研究极端环境应用的新材料与器件, 联系地址:福建省厦门市思明区思明南路422号厦门大学材料学院(361005), E-mail:yu_heart@xmu.edu.cn

引用本文:

余煜玺, 韩滨. PDC-SiBCN陶瓷基无线无源温度传感器的性能[J]. 材料工程, 2020, 48(1): 121-127.
Yu-xi YU, Bin HAN. Performance of PDC-SiBCN ceramic based wireless passive temperature sensor. Journal of Materials Engineering, 2020, 48(1): 121-127.

链接本文:

http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2018.001319 或 http://jme.biam.ac.cn/CN/Y2020/V48/I1/121

Fig.1 PDC-SiBCN陶瓷基无线无源温度传感器实物图
(a)STC-1；(b)STC-2；(c)STC-3；(d)STC-4；(e)STC-5

Table 1 无线无源温度传感器的尺寸与开槽天线的参数

Fig.2 传感器的高温测试系统(a)和传输距离示意图(b)

Fig.3 时域通道设置后测得的传感器在升温过程中的S₁₁信号响应
(a)STC-1；(b)STC-2；(c)STC-3；(d)STC-4;(e)STC-5

Fig.4 传感器的谐振频率-温度曲线
(a)不同直径；(b)不同热解温度

Fig.5 传感器STC-2的谐振频率和陶瓷的介电常数随温度的变化(a)和谐振频率-温度拟合曲线(b)

Fig.6 传感器STC-2的高温循环测试曲线

Fig.7 传感器STC-2在升温过程中的无线传输距离测试
(a)20 ℃；(b)200 ℃；(c)600 ℃；(d)1100 ℃；(e)实际最大传输距离

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