The high temperature resistant polymer derived ceramic (PDC-SiBCN) was used as a temperature sensitive dielectric material, and metal platinum was used as a resonant cavity material, and a coplanar antenna was formed by slotting on the surface of the ceramic to fabricate a wireless passive temperature sensor integrating the slot antenna and the resonator. The sensor can realize the wireless passive transmission of temperature information. The results show that the resonant frequency of the sensor is declined monotonically with the increase of the testing temperature, the dielectric constant of PDC-SiBCN ceramic is increased monotonously with increasing temperature, and the sensor with a pyrolysis temperature of 1000℃ is tested up to 1100℃, which has excellent high temperature resistance and dielectric temperature properties. At the same test temperature, the resonant frequency of the sensor is decreased with increasing diameter and also is reduced with increasing pyrolysis temperature. The sensitivity equation is obtained by performing a first-order partial derivative of the resonant frequency-temperature fitting curve of the sensor, and the sensor has a high sensitivity at a high temperature of 1100℃. The sensor has good cycle stability, and it has an actual wireless transmission distance of 42 mm at room temperature and a transmission distance of up to 8 mm when the testing temperature is 1100℃, which can be used for temperature monitoring of aero-engine in high temperature and harsh environments.
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