反应磁控溅射法制备F掺杂ZnO(FZO)薄膜的结构和透明导电性能
祝柏林, 郑思龙, 谢挺, 吴隽
Structure and transparent conductive properties of F-doped ZnO(FZO) thin films prepared by reactive magnetron sputtering
Bai-lin ZHU, Si-long ZHENG, Ting XIE, Jun WU
材料工程
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2021, (11): 98
-104
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DOI: 10.11868/j.issn.1001-4381.2021.000132
