基于PI的3D叉指电极对称微型电容器的制备及性能
纪伟伟, 高鹏, 刘宝成, 孟占昆, 王赫, 刘兴江
Preparation and properties of 3D cross-finger electrode symmetrical micro capacitor based on PI
Weiwei JI, Peng GAO, Baocheng LIU, Zhankun MENG, He WANG, Xingjiang LIU
材料工程
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2023, (11): 205
-213
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DOI: 10.11868/j.issn.1001-4381.2023.000018
