离子刻蚀多晶铜机理及其对表面形貌的影响
易晨曦, 田野菲, 张浩天, 胡跃, 鲍明东
Mechanism of ion etching polycrystalline copper and influence on surface morphology
Chenxi YI, Yefei TIAN, Haotian ZHANG, Yue HU, Mingdong BAO
材料工程
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2023, (12): 169
-176
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DOI: 10.11868/j.issn.1001-4381.2022.000890
