负偏压对高界面强度类金刚石薄膜制备的影响
郑锦华, 李志雄, 刘青云, 梅诗阳
Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength
Jinhua ZHENG, Zhixiong LI, Qingyun LIU, Shiyang MEI
材料工程
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2023, (10): 93
-100
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DOI: 10.11868/j.issn.1001-4381.2022.001081
