基于磁控溅射的Pt/PtRh高温薄膜热电偶传感器集成工艺
张文琦, 沈统, 王林斌, 赵未昀, 邓元
Integration technique of Pt/PtRh high- temperature thin film thermocouple sensors fabricated via magnetron sputtering
ZHANG Wenqi, SHEN Tong, WANG Linbin, ZHAO Weiyun, DENG Yuan
材料工程
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2024, (9): 27
-33
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DOI: 10.11868/j.issn.1001-4381.2023.000496
