功率对脉冲直流磁控溅射制备Si-DLC薄膜组织与性能的影响
王少辉, 柴利强, 胡勇, 王鹏, 李勇
Effect of power on microstructure and properties of Si-DLC films fabricated by pulsed direct current magnetron sputtering
WANG Shaohui, CHAI Liqiang, HU Yong, WANG Peng, LI Yong
材料工程
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2026, (10): 231
-240
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DOI: 10.11868/j.issn.1001-4381.2024.000539
