基体负偏压对类金刚石涂层结构和性能的影响
纪锡旺, 许振华, 贺莉丽, 何利民, 郝俊文, 甄洪滨
Influences of Substrate Negative Bias Voltage on Microstructure and Performance of DLC Coatings
Xi-wang JI, Zhen-hua XU, Li-li HE, Li-min HE, Jun-wen HAO, Hong-bin ZHEN
材料工程
.
2015, (8): 43
-49
.
DOI: 10.11868/j.issn.1001-4381.2015.08.008
