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Structure and transparent conductive properties of F-doped ZnO(FZO) thin films prepared by reactive magnetron sputtering
Bai-lin ZHU, Si-long ZHENG, Ting XIE, Jun WU
Journal of Materials Engineering . 2021, (11): 98 -104 .  DOI: 10.11868/j.issn.1001-4381.2021.000132