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Preparation and properties of 3D cross-finger electrode symmetrical micro capacitor based on PI
Weiwei JI, Peng GAO, Baocheng LIU, Zhankun MENG, He WANG, Xingjiang LIU
Journal of Materials Engineering . 2023, (11): 205 -213 .  DOI: 10.11868/j.issn.1001-4381.2023.000018