Preparation and properties of HfO2 coatings by chemical vapor deposition
Ruipeng HE, Li'an ZHU, Zhen WANG, Yicong YE, Shun LI, Yu TANG, Shuxin BAI
Journal of Materials Engineering . 2024, (5): 67 -75 .  DOI: 10.11868/j.issn.1001-4381.2023.000561