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Integration technique of Pt/PtRh high- temperature thin film thermocouple sensors fabricated via magnetron sputtering
ZHANG Wenqi, SHEN Tong, WANG Linbin, ZHAO Weiyun, DENG Yuan
Journal of Materials Engineering . 2024, (9): 27 -33 .  DOI: 10.11868/j.issn.1001-4381.2023.000496