化学气相沉积HfO2涂层的制备及性能
何锐朋, 朱利安, 王震, 叶益聪, 李顺, 唐宇, 白书欣
Preparation and properties of HfO2 coatings by chemical vapor deposition
Ruipeng HE, Li'an ZHU, Zhen WANG, Yicong YE, Shun LI, Yu TANG, Shuxin BAI
材料工程
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2024, (5): 67
-75
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DOI: 10.11868/j.issn.1001-4381.2023.000561
