氧化石墨烯在碳化硅电化学机械抛光中的作用机制及工艺
彭超, 任荣浩, 王子睿, 王永光, 黄冬梅, 朱睿, 成锋
Mechanism of action and process for graphene oxide in electrochemical mechanical polishing of silicon carbide
PENG Chao, REN Ronghao, WANG Zirui, WANG Yongguang, HUANG Dongmei, ZHU Rui, CHENG Feng
材料工程
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2025, (8): 185
-192
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DOI: 10.11868/j.issn.1001-4381.2023.000441
