Zr掺杂对Y2O3/金刚石薄膜结构与性能的影响
操淑琴, 黄亚博, 陈良贤, 刘金龙, 魏俊俊, 李成明
Effect of Zr doping on structure and properties of Y2O3/diamond films
CAO Shuqin, HUANG Yabo, CHEN Liangxian, LIU Jinlong, WEI Junjun, LI Chengming
材料工程
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2025, (10): 165
-172
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DOI: 10.11868/j.issn.1001-4381.2023.000366
