PVD法制备(Ti,Al)N涂层中残余应力对其质量的影响

吴化, 陈涛, 宋力

Effects of Residual Stress on Quality of (Ti,Al)N Coatings Deposited by PVD Method

WU Hua, CHEN Tao, SONG Li

材料工程 . 2013, (2): 60 -64,92 . DOI: 10.3969/j.issn.1001-4381.2013.02.012