磁控溅射NbSiN复合膜的微结构和性能

喻利花, 苑彩云, 许俊华

Microstructures and Mechanical Properties of Magnetron Sputtered NbSiN Composite Films

YU Li-hua, YUAN Cai-yun, XU Jun-hua

材料工程 . 2013, (7): 35 -39 . DOI: 10.3969/j.issn.1001-4381.2013.07.007